Microfabrication techniques for microsensors, microstructures, and microdevices. Selected examples of physical/chemical sensors and actuators. Simulation experiments. Course Information: Same as ME 449. 4 undergraduate hours. 5 graduate hours. Laboratory. Prerequisite(s): ECE 347; or consent of the instructor. Class Schedule Information: To be properly registered, students must enroll in one Laboratory and one Lecture-Discussion.